| 000 | 01326nam a22003137a 4500 | ||
|---|---|---|---|
| 001 | 11872674 | ||
| 003 | usth | ||
| 005 | 20190418174715.0 | ||
| 008 | 991220s2000 paua b 100 0 eng | ||
| 020 | _a0803126158 | ||
| 082 | 0 | 0 |
_a621.382 _222 |
| 245 | 0 | 0 |
_aGate dielectric integrity : _bmaterial, process, and tool qualification / _cDinesh C. Gupta and George A. Brown, editors. |
| 260 |
_aWest Conshocken, Pa. : _bASTM, _cc2000. |
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| 300 |
_axi, 169 p. : _bill. ; _c23 cm. |
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| 490 | _aCollection of Advanced Material Science and Nanotechnology Books | ||
| 504 | _aIncludes bibliographical references. | ||
| 650 | 0 |
_aSemiconductor wafers _xReliability. |
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| 650 | 0 |
_aIntegrated circuits _xWafer-scale integration _xReliability. |
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| 650 | 0 |
_aGate array circuits _xMaterials. |
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| 650 | 0 |
_aSilicon oxide films _xTesting. |
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| 650 | 0 |
_aDielectrics _xTesting. |
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| 700 | 1 |
_aGupta, D. C. _q(Dinesh C.) |
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| 700 | 1 |
_aBrown, George A., _d1937- |
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| 711 | 2 |
_aConference on Gate Dielectric Integrity _d(1999 : _cSan Jose, Calif.) |
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| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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| 911 | _aNNPhuong | ||
| 942 |
_2ddc _cCK |
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| 955 | _ato ASCD pc20 12-20-99; jf02 12-22-99; jf08 12-22-99 to SL; jf12 to Dewey 12-22-99; aa07 12-23-99; CIP ver. jf03 07-24-00; jf12 to BCCD 07-26-00; copy 2 added jf16 to BCCD 04-19-01 | ||
| 999 |
_c19998 _d19998 |
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