Gate dielectric integrity : (Biểu ghi số 19998)
[ Hiển thị MARC ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 01326nam a22003137a 4500 |
| 001 - CONTROL NUMBER | |
| control field | 11872674 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | usth |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20190418174715.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 991220s2000 paua b 100 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0803126158 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.382 |
| Edition number | 22 |
| 245 00 - TITLE STATEMENT | |
| Title | Gate dielectric integrity : |
| Remainder of title | material, process, and tool qualification / |
| Statement of responsibility, etc. | Dinesh C. Gupta and George A. Brown, editors. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | West Conshocken, Pa. : |
| Name of publisher, distributor, etc. | ASTM, |
| Date of publication, distribution, etc. | c2000. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xi, 169 p. : |
| Other physical details | ill. ; |
| Dimensions | 23 cm. |
| 490 ## - SERIES STATEMENT | |
| Series statement | Collection of Advanced Material Science and Nanotechnology Books |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Includes bibliographical references. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Semiconductor wafers |
| General subdivision | Reliability. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Integrated circuits |
| General subdivision | Wafer-scale integration |
| -- | Reliability. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Gate array circuits |
| General subdivision | Materials. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Silicon oxide films |
| General subdivision | Testing. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Dielectrics |
| General subdivision | Testing. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Gupta, D. C. |
| Fuller form of name | (Dinesh C.) |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Brown, George A., |
| Dates associated with a name | 1937- |
| 711 2# - ADDED ENTRY--MEETING NAME | |
| Meeting name or jurisdiction name as entry element | Conference on Gate Dielectric Integrity |
| Date of meeting | (1999 : |
| Location of meeting | San Jose, Calif.) |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) | |
| a | 7 |
| b | cbc |
| c | orignew |
| d | 1 |
| e | ocip |
| f | 19 |
| g | y-gencatlg |
| 911 ## - EQUIVALENCE OR CROSS-REFERENCE-CONFERENCE OR MEETING NAME [LOCAL, CANADA] | |
| Meeting name or jurisdiction name as entry element | NNPhuong |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | |
| Koha item type | Sách chuyên khảo |
| Đăng ký cá biệt | Ngày bổ sung | Ngày áp dụng giá thay thế | Nguồn phân loại | Cập nhật lần cuối | Thư viện sở hữu | Không cho mượn | Thư viện hiện tại | Ký hiệu phân loại | Trạng thái mất tài liệu | Loại khỏi lưu thông | Trạng thái hư hỏng | Kiểu tài liệu |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| MSN.EB.000319 | 2019-04-18 | 2019-04-18 | 2019-04-18 | Thư viện Trường ĐH Khoa học và Công nghệ | Sẵn sàng | Thư viện Trường ĐH Khoa học và Công nghệ | 621.382 | Sẵn sàng | Sẵn sàng | Sách chuyên khảo |