GIỜ PHỤC VỤ BẠN ĐỌC

Hiển thị đơn giản Hiển thị MARC Hiển thị ISBD

Gate dielectric integrity : material, process, and tool qualification / Dinesh C. Gupta and George A. Brown, editors. - West Conshocken, Pa. : ASTM, c2000. - xi, 169 p. : ill. ; 23 cm. - Collection of Advanced Material Science and Nanotechnology Books .

Includes bibliographical references.

ISBN: 0803126158

Subjects--Topical Terms:
Semiconductor wafers--Reliability.
Integrated circuits--Wafer-scale integration--Reliability.
Gate array circuits--Materials.
Silicon oxide films--Testing.
Dielectrics--Testing.

Dewey Class. No.: 621.382